This is often the "hottest" topic for researchers. The text explores the evolution from optical lithography to electron-beam and X-ray techniques. Understanding the limits of light wavelength is key to understanding why we now use Extreme Ultraviolet (EUV) lithography in modern foundries like TSMC and Intel. 4. Etching and Deposition
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As we push toward 1nm nodes, new materials (2D semiconductors like graphene) and new architectures (CFETs) emerge. Surprisingly, this makes Sze’s VLSI Technology relevant, not less. This is often the "hottest" topic for researchers